Aerotech, Inc. Product
Member Since 2014
Aerotech设计和制造的最高性能ormance motion control and positioning systems for customers in industry, government, science, and research institutions around the world. Aerotech's precision motion control products provide the critical performance for today's demanding applications in markets such as aerospace and defense, medical device and life sciences, semiconductor and flat panel, photonics, automotive, data storage, laser processing, electronic manufacturing and test, assembly, research and development, and others requiring high precision, high-throughput motion solutions.
Product filed under:
High Precision Stages / Air Bearing Systems, Positioning Slides / Linear Units, and Power TransmissionHigh Precision Stages / Air Bearing Systems, Positioning Slides / Linear Units, Power Transmission, and Actuators & Mechanics
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XY Piezo Nanopositioning Stages with 50 mm x 50 mm Aperture
Model: QNP2 Series
- Patent-pending design provides unmatched geometric performance
- Superior multi-axis accuracy via parallel-kinematic design
- Custom materials and vacuum versions
- Travels to 120 μm x 120 μm
- 50 x 50 mm clear square aperture
Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, and other applications where two-sided part access is required.
Precision Design
QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest level of multi-axis accuracy. FEA-optimized precision flexures ensure high-stiffness and long device life. High stiffness and resonant frequency enable exceptional process throughput and fast closed-loop response. A patent-pending drive design minimizes yaw errors while maintaining an Abbe-compliant metrology system.
All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage enabling 0.15 nm resolution, 0.01% linearity, and 1 nm bidirectional repeatability.
Ultra-Precision Control with Options
Aerotech’s Q-series controllers and drives provide a variety of convenient software options. The Dynamic Controls Toolbox and Motion Designer packages have a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping to improve tracking errors and increase step-and-settle times. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.
An optional mounting plate allows direct mounting to English or metric breadboard optical tables, and a solid tabletop is available. QNP2 piezo stages are also offered in custom materials and vacuum-prepared versions.
